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| FY 2016 | < Equipment and Systems > Organic EL Device Producing System #1 : OLED-K1
 Organic EL Device Producing System #2 : OLED-K2
 Special Type CRYO System : KCRYO-01
 Submerged Thin Film Coating System : KEHC-01
 Surface Ionizer Unit #3 : KSI-III
 Motor Controller with Potentiometer Voltage Detection
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| < Components and Mechanisms > Antistatic Electron Gun : FS40A1
 Vacuum Compatible Small Z⋅θ Stage : KSZθ-01
 Multi-Functional Holder : KMFH-01
 Transportation mechanism for Organic Photoelectric Conversion Film Deposition Equipment
 Shutter Plate for Organic Deposition Cell
 Hollow Rotary Drive
 Exhauster for Ultra-High Vacuum Detector Chamber
 Stage Controller
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| < TEM Sample Holders > No Air-Exposure Electrical Measurement Holder
 Peltier Temperature Control Holder
 Dual-Axis Heating & Straining Holder
 Standard Holder : KTEMH-01
 Grid Heating Holder for Ion Cleaner
 Remodeling of the Straining Holder
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| < UHV chambers > MBE Chamber
 STM Chamber
 XPS Sample Introduction Chamber (Load Lock Chamber)
 Reaction Vessel : KRC-2015
 Observation Chamber
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| < Cells and Crucibles etc. > Small CLBO Temperature Control Cell
 Mounting Direction Free Metal Evaporation Source : KFMD-1
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| < Repair, Customizing and maintenance, etc. > Overhaul of Cryo Pump
 Detoxification of Bell-jar Type Deposition System
 Overhaul of Dry Pump
 Customizing of Organic EL Device Manufacturing System
 Cell Shutter Repair (Exchanging)
 Relocation of Organic EL Device Manufacturing System
 Relocation of STM Equipment
 Relocation of Film-Forming System for Organic Material Development
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| FY 2015 | < Equipment and Systems > Ion Etching System : KIES-01
 Gas Analyzer System : KGA-System
 MBE System
 Neutralization Efficiency Measurement System
 OPV Deposition System
 Auger Electron Spectroscopy System
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| < Components and Mechanisms > Ultra-High Vacuum Compatible Substrate Heating Unit: KUHV-SH
 4-Axis Manipulator with Sample Cooling Stage : KSCM-04
 Permalloy Shield for XPS : KXPS-S01
 Submerged Measurement MCBJ Unit : KMCBJ-03
 H2O Trap Cooling Unit
 Monovalent Ion Source for Mass Spectrometry System
 Sample Stage ω-axis Specifying Unit
 Motor Driven Semi-Manipulator
 X-Y Stage for Detector Position Changing
 Heating Stage for Sample Measurement
 Discharge Unit
 Vacuum Exhaust System for Mass Spectrometry
 Ni Base
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| < Cryogenic equipment > LHe Transfer Tube
 LN2 Cooling Probe Unit
 Sample Cooling Head
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| < TEM Sample Holders > Vacuum Sealed Cooling TEM Holder
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| < UHV chambers > Backbone Chamber
 Extreme-High Vacuum Chamber
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| < Cells and Crucibles etc. > Sample cell for In Situ XRD Observation of Catalytic Reaction: KBW-XRDSC
 Metal Deposition Cell : KMD-Cell
 Organic Deposition Cell
 Crucible for Organic Deposition Cell
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| < Repair, Customizing and maintenance, etc. > Detoxification of Gallium Arsenide Growth MBE System
 Software Full-Automation of Vacuum Deposition System
 English Translation of OELD Device Manufacturing System Software
 Maintenance of Organic Deposition Cell
 Overhaul of Cryo Pump
 Maintenance of Laser Sputtering Equipment
 Relocation of MBE Equipment
 Relocation of Organic EL Device Manufacturing Equipment
 Relocation of Vacuum Equipment
 Vacuum Heating Degassing Services
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| FY 2014 | < Equipment and Systems > OLED Deposition Machine <TYPE-A1>
 OLED Deposition Machine <TYPE-A2>
 Special Load Lock System
 Sample cooling system KSCS-01
 Relocation of vacuum System
 Submerged deposition apparatus TLE-01
 Electrode coating apparatus KECE-01
 PYS-IPES composite device
 Load lock system equipped with transport mechanism KLL-316L-TR
 Friction testing machine for SEM introduction
 Holder drive system
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| < Devices and Machinery etc. > Target heating mechanism
 MCBJ unit MCBJ-02
 Multi-pole terminal introduction unit
 Automation of controlling organic film deposition source
 Bellows and adjustment mechanism for superconductor loaded driving
 Vacuum correspondent ultra-compact four-quadrant slit for soft X-rays
 Slow positron beam pulse stretching section
 Sample heating & cooling stage
 Beam flux monitor
 Temperature controller for cryogenics
 Adjusting coil installation frame KACF-01
 Environmental control gas supply unit for stand and exhaust unit
 Short pipe with Beryllium window
 Electron gun for sample cleaning
 Heating type manipulator for sputtering equipment
 Manipulator for MCP
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| < Cryogenic Equipment > Ultra-high vacuum corresponding sample exchange system for cryostat
 Helium condenser for MRI
 Transfer tube for remodeled HCS
 4K corresponding type cryohead KCH4K-2013
 Cold trap Unit 3
 Cold chamber for HCS
 MRI experimental cold chamber
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| < Sample Holders for TEM > TEM holder for organic device observation KOD-TEM01
 Two axial load applying TEM holder KL II T-01
 Cryogenic type TEM holder
 Current - voltage measurement TEM holder
 Uniaxial inclination gas heating sample TEM holder
 Piezo driven two-consecutive-probe electron microscope holder core axis for air cutoff holder
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| < UHV chambers > Ultrahigh vacuum chamber
 Vacuum chamber for organic vapor deposition substrate transportation
 Load lock vacuum chamber
 RT-STM Chamber
 Sample chamber
 Ultra-high vacuum chamber KUHVC-316
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| < Cells and Crucibles etc. > Cell vacuum storage container (SUS316L)
 Cell degassing chamber
 LN2 shroud for cell degassing
 Small temperature control cell for nonlinear crystal
 CLBO small temperature control cell for loading
 Experimental sample cell (II)
 CLBO small temperature control cell for solid laser base
 Crucible of KOD-Cell
 Tungsten crucible
 Deposition cell crucible
 Plasma cell
 Deposition preventing mask
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| FY 2013 | Aluminium vapor deposition system Ion source chamber : KION-01
 Simple Organic Vapor Deposition apparatus
 5-axis automatic sample stage
 Low-melting-point material deposition system : KLTDS-5501
 Cryogenic rotary joint
 Sample heating chanber
 3-axis stage for Soft X-ray diffraction equipment
 VAC tilt mechanism
 Sample tilt mechanism
 Piezo rotation stage
 Monitering system
 Long period heating evaporation source
 Vacuum-sealed transport TEM holder
 Organic device observation TEM holder
 Vacuum chamber
 Sample cooling system for background-reduced synchrotron radiation X-ray structual analysis
 Glove box for arganic EL manufacturing
 Coating material evaluation system
 Loe temperature trap type gas collection/analysis equipment
 High-speed shutter for Low temperature trap type gas collection/analysisnequipment
 TEM holder storage glove box
 Lq.H2 Transfer tube
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| Silver thin film magnetron sputtering system Cryogenic MCBL system
 Ultra-high vacuum substrate transport system
 Piezo driven probe holder
 MCD/ Low temperature conductivity measurement holder
 160 port manifold
 Optical chanber
 Special type Ultra high vacuum chanber
 2-axsis rotary feed through (Special type)
 EB vapor deposition apparatus
 Vacuum valve for Twin-chanber type vacuum tube furnace
 Gas analyzer
 STM unit
 Superconducting magnet
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| Organic EL Deposition Device System Thermal CVD System : KCVD-5501HK
 MBE System
 Spin spray ferrite plating System KSS-1
 Neutralization unit. No.3
 Radiation pulse magnetic field XMCD measurement sample manipulation system
 Ultra-high vacuum layer and ultra-low temperature scanning probe microscope system
 XPS equipment for ultra-high vacuum system
 MBE / sputtering system
 Vacuum -sealed for transport TEM holder
 KTEM-02 Environmental control sample TEM holder KTEM-02
 Air cutoff holder for material cooling holder Shin-jiku
 Vacuum sample transfer mechanism (TEM / FIB)
 Thermal desorption mechanism
 Sample cooling cleaving mechanism
 Friction tester introduction unit
 Ultra-high vacuum cryogenic small refrigerator
 Vacuum insulation member
 Thermionic current pressure measuring device controller (II)
 Pretreatment chamber Manipulator
 Ultra-high vacuum chamber tunnel
 E-Gun chamber
 High resolution RBS chamber
 ERDA chamber
 Sputtering chamber
 XPS chamber
 STM chamber
 Focused ion beam equipment type diffraction microscope detection barrel
 Leak detector ( ULVAC-PHI , Inc. products)
 Cryopump Overhaul ( Aisin Seiki Co., Ltd.)
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| FY 2012 | Oxidation processing apparatus Stage system for Magnetic conduct measurment
 Organic materials deposition evaluate system
 Fabrication System for special type of organic devices
 Passive type organic EL manufacturing experiment system
 Crucible for Metal efusion cell (Knudsen-cell)
 Organic material evaporation system
 Power source for organic material efusion cell
 D.C. powr source for metal effusion cell
 Ultra high vacuum contact-probe system
 Sample cleavage mechanism with cooling unit
 Special type low temperature sputtering system
 Special type sputtering sysytem
 Soundproof panel for sputtering system
 Cooling type cluster system/Cluster depositon system
 Large size HF-CVD system
 Beem moniter & Target transfer mechanism
 Beem flux moniter
 Air-isolating holder
 Measurment system for thermal electron emission current
 MCBJ system
 Calibration apparatus for Vacuum gauge
 Capacitance type dew-point meter
 Ultra high vacuum STM system corresponding to high magnetic field
 STM system with Vibration damping
 Transfer chamber for STM
 Cryostat for LT-STM
 Cryostat
 Cooling dewar for magnets
 Compact size ultra-high vacuum cryogenic refrigerator
 Sample transfer mechanism : KSCS-01
 High voltage feed-in bell-jar apparatus
 High voltage manipulater
 Shutter mechanism for somposition gradient film
 Two gas-inlet TEM holder
 Sample measurement and storage desiccator
 5-axis  automatic sample stage
 Exchanging system for detectors and samples
 Ultra-high vacuum 4D slit
 Optical axis checking equipment
 Special vacuum pumping system
 Gas heating TEM holder with 2-axsis tilting
 Sample manipulator system
 Sample manipulater for measurement with heating
 Chanber and stage for 2-axsis soft X-ray diffraction
 Substrate rotary system for oblique incidence with heating
 Resonant scattering and Diffraction: microscope camera feed-in mechanism
 3-axsis moving mechanism for XFEL diffraction imaging system
 High precision positioning target stage
 ω・2θ stage
 Load-lock system
 Solution container chanber for XAFS
 CCD hold stage
 Incidence gate valve
 Photon detector for Special electron holography
 Heat cover-sheald
 Atom probe
 Pressure chanber
 Ion-gun chanber
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| FY 2011 | 2Kv sputtering Ion gun Electron energy analysis system
 Neutral atom beam system
 Probe-tip observation system
 4 source-target sputtering chamber
 Sample exchange chamber for 4 source sputtering
 Τs stage for soft X-ray diffraction system
 TEM holder for liquid chemical reaction
 TEM holder for gas inlet and photon inlet mechanisms
 Insite observation TEM holder
 Cryostat xyz stage
 Positron and negative ion measuring system
 Field emission characteristic measuring system
 Automated xyx stage for small angle scattering
 Multi-pipe transfer tube
 Helium cooled chamber
 Single crystal growth system
 Saheting and cooling stage
 Organic EL fabrication system
 KC-FP trap system
 Organic EL fabrication system
 Ultra-high vacuum type RF sputtering system
 Metal efusion cell
 Ion-trap apparatus
 Motor dvrive probe u--down mechanism
 In-line globe box for organic device
 Frozen dryer
 Ultrta-high vacuum cryogenic cooling equipment
 Automated 5-axis sample stage
 Plasma generator
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| FY 2010 | LT-PFM device RB oven
 Vibration removal system for STM device
 Supersensitive electron beam observation device
 High-speed film producer for organic EL
 Ultra-high vacuum RF sputter deposition device
 Dry-freezing device
 Microgravity testing machine
 Organic thin film simple deposition OTFS R&D System
 Cooling beam exposure system
 Simple deposition device
 Small 3-dimension generator MF-150A/HP (CANON)
 Small electric injection device LS300i insertion device (CANON)
 UHV deposition chamber &substrate heating mechanism
 Electron energy analysis system KCMA-2009
 Simple FIM device
 FIM system w/ cooler for ultra-high vacuum low-temperature environments
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| TEM holder w/ heating mechanism TEM holder w/ deposition mechanism
 Electricity measurement TEM holder
 Gas-reactive TEM holder
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| X-line measurement chamber Chamber and block for Peltier element measurement
 Cubical chamber for quadruple electrode
 Chamber for granular body heat measurement
 Chamber for helium dewar
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| LHe tank Cryohead
 Radiation shield
 Test-cooling head w/ rotary mechanism
 LHe transfer tube
 Rotary joint for extremely low-temperature coolants
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| Box for transportation of organic elements (holding 16 units) Airtight container for organic elements
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| 3D-AP vibration control unit Magnetic seal unit
 VUV connection unit
 Etching regulator
 Sample transportation unit
 Test cooling unit
 Heated mercury vaporization unit
 Heat exchanger
 Thermionic current measuring unit
 Isolation stage for luminescence measurement
 Reaction chamber pressure measurement unit
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| Mobile organic deposition source Horizontality projection deposition source
 High-temperature deposition source
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| Quadrisection deflecting electrode RF-CVD anode electrode
 Quadrupole electrode
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| Film window for soft X-line In-vessel viewing system
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| Electric current heating holder for LT-STM High-pressure cell for X-line
 Spin polarized positron capsule
 Magnetic field application sample holder
 etc.
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| FY 2009 | Organic material film formation device Electron device evaluation device
 Electron device manufacture device
 Totally automatic film formation evaluation device
 Organic EL film formation device remodeling (test-system from other company)
 High-efficiency film formation device
 Evaporator System CS-VE1
 Ultra-high vacuum synchronous sputtering device
 Sputtering & EB deposition composite device
 Hybrid (EB & K-Cell) deposition device
 Hybrid (organic & metal) deposition device
 Ultra-high vacuum system KSPS-01 for vacuum deposition
 Electrochemical UHV device
 Spin-polarized electron manufacture device
 Special ultra-high vacuum device
 High-pressure gas cell internal vacuum device
 MCBJ device for low-temperature measurement
 Insert-type Piezo drive low-temperature device
 Vacuum device for electrical discharge testing
 Electron energy analysis system KCMA-114N
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| LL/Stocker chamber unit Sample cleaning unit
 FEM device electric current detector
 FIM device electric current detector
 MCP unit w/ Faraday cup
 Tension slide mechanism
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| Superconducting magnet XYZR moving stage Superconducting magnet rotary stage 360R
 4XY stage for 4 probe
 6 inch substrate-compatible XYZ stage
 Cooling stage
 Test-cooling stage
 Test-cooling head
 Sample platform for electricity measuring
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| Special simple metal deposition cell KMDS-3ccCell Two-dimensional metal deposition cell
 Special low-temperature deposition cell
 Special sputtering source
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| Special rotary platform I KPP-120 (O-ring type) GAS tank for reactive TEM holder
 Low-temperature TEM holder
 Heating TEM holder
 Holder for fiber introduction TEM
 φ3.5 separation probe
 Test-heating contact probe
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| Rotary joint for low-temperature coolant container LT-RJ Electron analyzer
 Special vacuum transportation chamber
 Spectroscope connector flange
 Reaction vessel
 etc.
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| FY 2008 | Organic EL deposition device for small matter examination BeCu-EB deposition device
 Organic EL material film formation evaluation device
 Organic EL element manufacture device
 Ultra-high vacuum precise deposition device for nano thin film
 VT-STM device
 Organic EL thin film sealing device
 Hot filament-type diamond synthesis device
 Organic thin film formation device
 Decompression dry hot plate
 3D-AP charge cell
 Laser induction-type atomic spectroscopy device (standard:KLAS-5001)
 Multi-chamber-compatible transportation chamber (standard: KMLL-2007
 Electric field ion emitter evaluation device
 Electrical conduction measurement vacuum column system
 Hydrogen atmosphere sample heating device
 Shock observation chamber
 Plasma CVD device (standard: KP-CVD2008)
 Spin spray thin film formation device
 Testing cryostat
 Sputtering source (standard: KONYX-3UHV)
 Copper beam chamber
 Ultra-high vacuum-compatible load lock chamber (standard: KUHVS-LL)
 FIM device
 LHe tank
 Insert for high-magnetic STM (standard: KSTM-INSERT2007)
 Plasma generator
 Ultra-high vacuum test-manufacture chamber
 FIM cooling unit (standard: Helium induction nipple #NI-HE20)
 3-dimensional metal deposition cell (standard: KMDT-Cell)
 Large superconducting bulk magnetization device for refrigerator
 FEM device gimbal mechanism
 Sample transportation mechanism
 Electron energy analysis system (standard: KCMA-114N)
 etc.
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| FY 2007 | Electron beam holography detector system Organic deposition device w/ vacuum heater
 Laser-supported wide-angle 3-dimensional atom probe unit
 Electric field ion microscope
 Drum-type deposition device
 Molecular beam epitaxy device (standard: KSMBE-2007)
 UHV-CVD device
 Quantum bit testing device
 Crucible bakeout device
 FEM device
 Transportation chamber for cool polarized atoms (standard: KSC-2007)
 Electron beam deposition device
 Moving of molecular beam epitaxy device
 Multi-chamber-compatible load lock room (standard: KSIM-2007)
 Double-axis, slanted high-temperature test holder (standard: KTWHT-4801)
 Reflectron device
 XYZ stage (6-inch substrate-compatible)
 Vacuum chamber for sulfur treatment
 4-terminal spin polarization rate measurement device
 Atmospheric pressure CVD device
 Vacuum friction/wear testing apparatus
 Simple FEM device
 Organic deposition device w/ vacuum heater
 Sample cooling device for low-temperature magnetic measurement
 4-inch-compatible deposition device II
 Cooling test device
 Sample heating/cooling stage for LEED
 Spin spray ferrite plating device
 Cryo-needle device
 Sample heating unit for STM
 3-dimensional atom probe device
 STM low-temperature measurement device
 High-speed rotary manipulator
 Electron energy analysis system (standard: KCMA-114N)
 etc.
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| FY 2006 | Type II rock failure cell for gas emission collection Gas emission processing unit for organic deposition sources
 Organic deposition device
 Ultra-precise triple manual/double automatic axis testing stage
 Ultra-precise quintuple axis automatic testing stage
 TEM holder for heating
 Superconducting magnet low-temperature measurement instrument
 Field emission measurement device / type KFEM-48
 Organic film analyzer
 High-capacity organic cell w/ fluctuation mechanism
 Simple OES device
 HFCVD device
 Cryo-needle device
 Special film manufacture device
 Ionization chamber
 Reflectron chamber
 Stretching testing apparatus
 Type II four-point bending testing apparatus
 TEM heating holder
 Sample heating stage
 Sample cooling stage
 Sample transportation stage
 KFJ-1800 4-inch-compatible deposition device
 Organic solar battery film formation device
 4-dimensional magnetron sputtering-compatible ultra-high vacuum device
 TEM holder
 Observation chamber
 Ultra-high vacuum FIM/TOFMS device/KFIM-4801
 Ultra-high vacuum chamber for atom trap testing
 Helium circulation device
 Hand-maneuvered synchronization device ‘06 kit
 CVD device
 Rotating sample holder
 Spin spray ferrite plating device
 Measurement device for low-temperature hall results/KHE-1000
 TEM-STM test unit
 LHe cryostat
 Ultra-high vacuum-compatible laser microscope
 Vacuum chamber system w/ ultra-high vacuum-compatible anti-vibration mechanism/KDPUHV1
 E-GUN deposition device/KJST-3000
 Vacuum heating press
 TEM testing electricity measurement unit
 Ne-compatible rotary joint / Type KRJ-31
 FED measurement chamber
 STM sample transportation unit
 High-speed rotation manipulator
 PG/PBN heating stage & heating source
 Micro RHEED chamber
 Extreme low-temperature manipulator for micro RHEED
 Laser induction optical window/KS-AP-LW1
 2-dimensional magnetron sputtering device
 Atomic Force Microscope device
 On-site analysis system for ultra-high vacuum environment
 Ultra-high vacuum-compatible load lock chamber/KUHVS-LL
 Sputtering source/KONYX-3UHV
 Carbon nanotube growth device
 etc.
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| FY 2005 | E-GUN deposition device Thin film accumulation device for superconducting joining
 Vacuum vessel for low-temperature STM
 Organic device manufacture / evaluation equipment
 Film manufacturer
 Solar battery thin film heating device
 MBE device for OX
 Organic electron device evaluation equipment
 Low-temperature STM device
 Electron energy analysis system KCMA-114N
 Shuttle chamber
 Ultra-precise 5-axis testing stage
 Vacuum device for electrode formation
 Ultra-high vacuum deposition device
 STM/FIM device
 Material transportation chamber
 Small vacuum testing device
 Multi-probe head
 Remodeling of deposition device
 Copper beam chamber
 Sputtering device
 High-efficiency sextuple transfer tube
 High-efficiency septuple transfer tube
 High-temperature heating holder for E-GUN deposition device
 EXCHANGER
 Secondary electron detection chamber
 Ultra-high vacuum-compatible goniometer stage KXYZ-152
 Vacuum desiccator
 Heating unit
 etc.
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| FY 2004 | 3-dimensional atom probe 4-terminal cryostat
 4-terminal cryostat (CryoMini type)
 Ion trap electrode (36pin)
 Photoelectron counter ICF-114 type
 High frequency sputtering device KCH-2000
 5-axis material stage (2-axis motor)
 Material transportation device
 Multi-purpose transportation device KSC-1000
 Sample stock room
 Sample heating mechanism KSTN-1300
 Cell Baking System
 Target storage vessel
 Facing-target sputtering device
 Atmospheric pressure CVD device
 Large LN2 Dewar
 Ultra-high vacuum chamber
 Ultra-high vacuum surface-/nano structure investigation device
 Probe manufacture device
 Heating manipulator
 Substrate transportation device
 Dilution refrigerator KLHE-4000SP
 Low-temperature STM vacuum device
 Electron energy analyzer KCMA-YHV203
 Vacuum device for non-linear optical measurement
 Serial spray ferrite plating device
 etc.
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| FY 2003 | Wide-gap microcrystal Si: C manufacture device Energy-conserving 3-dimensional atom probe body
 Organic/metal composite deposition device
 Organic thin film pattern observation device
 Pre-treatment window for STM
 Stress patterning device KSEM-045
 Vacuum device w/ heating mechanism
 Extreme low-temperature electrical property analyzer
 Remodeling of thin film device
 E-gun deposition device
 Heating/cooling manipulator
 Small beam transportation device
 Cubical chamber
 Pattern accumulation unit
 Manipulator w/ heating mechanism
 Electron emission analyzer
 Electron spectroscopy device
 Stretching test device
 STM cryostat
 Sample transportation vessel
 Device for solution absorption
 HW- p chamber
 Radiation inducer
 Spin spray device
 Dry ice purification testing device
 Load-lock system
 Liquid nitrogen transportation device
 Conducting polymer testing device
 FTIR device
 Hybrid cycle proof testing device
 Spectroscope vacuum device
 Flat heating mechanism for ultra-high vacuum
 Field emission measurement chamber KDH-400
 Latent heat exchanger (030616)
 Rock failure cell (outgassing)
 etc.
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| FY 2002 | Metal mirror Iron will electromagnet for ultra-high vacuum
 LN2 Tank
 Liquid nitrogen shroud for ultra-high vacuum
 Heat conduction grip
 Drop hammer sensitivity testing apparatus for low-temperature environment
 Halogen measuring device
 Mirror drive mechanism
 MBE device
 Deposition device
 Sample heating/cooling device
 Gas assembly device
 Platinum electrode
 Light-sensor fiber unit
 Nanotube manufacture unit
 Contact probe
 Sapphire holder
 Tantalum deposition source
 Conducting polymer development testing device
 Absorption/desorption measuring device
 Latent heat exchanger
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| FY 2001 | IRAS vacuum measuring vessel for FTIR Shroud for cooling of RHEED sampling stage
 KBR window differential evacuation flange
 Photomultiplier tube case
 Reflexive infrared device
 Device for microgravity testing
 CCD cooling unit
 Testing electrode
 Hydrogen atomizer
 Heater holder for corrosion testing
 Transfer tube for dilution fridge
 Film thickness measuring device
 Test drive engine for field ion microscope
 Wire-winding device
 Heating sample stage
 Dilution refrigerator helium plumbing operating panel
 High-frequency etching device
 Grid stand
 BEC trap chamber
 Low-temperature measuring container
 Bulb system for power outage
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| FY 2000 | Etching chamber for on-site ESR measuring Quantized-functional photo-electronic material manufacturing device function
 Tip cleaning device
 Electron gun
 Surface property analysis device
 Ultrasonic wave motor
 Surface electron spectroscopy device
 Ultra-high vacuum cryostat
 Plasma CVD device
 3-dimension shape generation motion device
 EB process device
 Sputtering device
 Ultra-high vacuum surface local analysis device
 Proportional counter tube for Mossbauer internal conversion electron spectroscopy
 Mineral pulverization vessel
 Rb structure analysis device
 Near-field optical detector
 Cooling atom beam generator
 Optical fiber inducer
 Spin-spray ferrite plating device
 E-gun deposition source w/ shutter
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